Elastic Alloys with Low Thermal Expansion Coefficient for Measuring Instruments
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چکیده
منابع مشابه
Ultra-High Accuracy Measurement of the Coefficient of Thermal Expansion for Ultra-Low Expansion Materials
Microlithographic systems rely on precision alignment and a high-level of dimensional stability to achieve required performance. In critical applications, immunity to thermally induced dimensional changes is achieved by the use of low coefficient of thermal expansion (CTE) materials such as ULE® in components such as reflective optics and machine structures. ULE® has an expansion coefficient (α...
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This Article is brought to you for free and open access by the Mechanical Engineering at Digital Commons @ Loyola Marymount University and Loyola Law School. It has been accepted for inclusion in Mechanical Engineering Faculty Works by an authorized administrator of Digital Commons@Loyola Marymount University and Loyola Law School. For more information, please contact [email protected]. Re...
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ژورنال
عنوان ژورنال: Transactions of the Society of Instrument and Control Engineers
سال: 1981
ISSN: 0453-4654
DOI: 10.9746/sicetr1965.17.269